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QCM_6MHz Series – S-ABBAB-6MJ01

Quartz Thickness - Monitor Crystal

Feature

  • Quartz thickness sensor for high-stress material depositions
  • Alloy-Electrode
  • Dielectrics on semiconductor
  • High-stress metal depositions: SiO, SiO2, MgF2, TiO2
  • Compatible with Inficon™ type quartz crystal
  • Taitien Quartz Thickness-Monitor Crystal can be easily positioned inside Inficon™ thin film deposition controller equipment for your material depositions and vaccum evaporation

Overview

  • Diameter : 13.98 ± 0.03 mm
  • Freq. : 6 MHz
  • Contour : plano-convex
  • Electrode : Alloy
  • Packing : 10 crystals / disc

RoHS PB-free

Resonant Freq. @ 25°C
(MHz)
Min. Max.
5.980 5.992

Applications

  • QCM感測
  • 真空鍍膜設備
  • 薄膜沉積系統

Product Categories

  • 石英晶體微天平
  • 石英晶體微天平_6MHz系列

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