QCM_6MHz Series – S-ABBAB-6MJ01

QCM_6MHz Series – S-ABBAB-6MJ01

Quartz Thickness - Monitor Crystal

Product Highlight

  • Quartz thickness sensor for high-stress material depositions
  • Alloy-Electrode
  • Dielectrics on semiconductor
  • High-stress metal depositions: SiO, SiO2, MgF2, TiO2
  • Compatible with Inficon™ type quartz crystal
  • Taitien Quartz Thickness-Monitor Crystal can be easily positioned inside Inficon™ thin film deposition controller equipment for your material depositions and vaccum evaporation

Overview

  • Diameter : 13.98 ± 0.03 mm
  • Freq. : 6 MHz
  • Contour : plano-convex
  • Electrode : Alloy
  • Packing : 10 crystals / disc

RoHS PB-free

Hot
Resonant Freq. @ 25°C
(MHz)
Min. Max.
5.980 5.992

解决方案

  • QCM感测
  • 真空镀膜设备
  • 薄膜沉积系统

产品特色

产品类别

  • 石英晶体微天平
  • 石英晶体微天平_6MHz

相关资源